5 results
Characterization of Nitrogen Content/Distribution in SiON Gate Dielectrics using Angle-Resolved X-Ray Photoelectron Spectroscopy (AR-XPS) and Aberration Corrected Scanning Transmission Electron Spectroscopy (Cs-STEM)
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- Journal:
- Microscopy and Microanalysis / Volume 13 / Issue S02 / August 2007
- Published online by Cambridge University Press:
- 05 August 2007, pp. 856-857
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- August 2007
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Micro-Raman Characterization of Phase Formation and Thermal Stability of Nickel Silicide Thin Films.
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- Journal:
- Microscopy and Microanalysis / Volume 11 / Issue S02 / August 2005
- Published online by Cambridge University Press:
- 01 August 2005, pp. 2094-2095
- Print publication:
- August 2005
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Scanning Auger for Defect Root Cause Analysis: Advantages & Application Challenges
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- Journal:
- Microscopy and Microanalysis / Volume 11 / Issue S02 / August 2005
- Published online by Cambridge University Press:
- 01 August 2005, pp. 1610-1611
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- August 2005
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Evaluation of Single Semiconductor Defects Using Multiple Microanalysis Techniques
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- Journal:
- MRS Online Proceedings Library Archive / Volume 523 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 65
- Print publication:
- 1998
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Chemical Analysis of Particles and Semiconductor Microstructures by Synchrotron Radiation Soft X-Rays Photoemission Spectromicroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 524 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 227
- Print publication:
- 1998
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